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E-Beam & Thermal Evaporation System

E-Beam & Thermal Evaporation System

E-Beam & Thermal Evaporation System

Torr’s Electron Beam Deposition system is a practical and highly reliable system. The EB-4P systems have four pocket crucibles varying in volume and a variety of power sources.

Specifications

Electro-Polished Stainless Steel Chamber (D-shaped Box)
4” Diameter View Port on Front Door with Manual Shutter
Single/Multi Pocket E-beam Sources with Water Cooled Crucible (4cc up to 75cc)
High Voltage Power Supply (3kW to 15 kW) with X-Y Sweep Controller
Turbo Molecular Vacuum Pumping System with Matching Dual Stage Rotary Vane Pump
Quartz Crystal Thickness Sensor with Deposition Controller
Full Range Vacuum Gauge with Digital Display & Readout
Two Resistive Thermal Sources with Individual Shutters
PLC Controlled System

Options

Water Chiller
Load Lock System with Sample Transfer Adaptability
Multi-Axis Substrate Stage Rotation
Quartz Lamp Heater (from 300° C Up To 800 ° C)
Planetary Substrate Stage
PC Controlled System
Water Cooled Substrate Stage
SQC 310 Film Thickness Monitor & Deposition Controller
Motorized Shutter Assembly
Large Capacity Crucible & Power Supply
Dry Scroll Pump
Cryo Pumping System
Cold Cathode or Hot Cathode Ionization Gauge
Adjustable Size & Height Available for Substrate Stage
Additional Spare Flanges for Future Upgrades
Mass Flow Controller with Digital Readout
RF Cleaning Capability
In Situ Mask Changer

Contact Us at +9714 2152799

We can help you with a solution tailor to your specific need.

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Business Communications LLC, P O Box 233, Dubai, UAE
+9714 2152799
info@bcluae.com

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